Yushi Hamaya

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 5:30 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[12p-B401-1~16] 13.7 Compound and power electron devices and process technology

1:15 PM - 1:30 PM

[12p-B401-1] Anisotropy of GaN appearing by low bias dry etching using Cl₂ gas

〇(B)Yushi Hamaya¹, Moe Okamoto¹, Satoko Shinkai¹ (1.Kyuukou Univ)