Kazuki Miwa

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 5:30 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[12p-B401-1~16] 13.7 Compound and power electron devices and process technology

2:45 PM - 3:00 PM

[12p-B401-7] Thermal-assisted generation of sulfate radicals for contactless photo electrochemical (PEC) etching of n-GaN

〇(M1)Kazuki Miwa¹, Hiroki Ogami¹, Masachika Toguchi¹, Fumimasa Horikiri², Noboru Fukuhara², Yoshinobu Narita², Takehiro Yoshida², Taketomo Sato¹ (1.Hokkaido Univ. RCIQE, 2.SCIOCS Co. Ltd.)

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