Toshihiko Sakai

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:30 AM - 11:30 AM

[15a-PA5-5] Low temperature top-gate IGZO TFT using SiO:F film by ICP CVD

〇Toshihiko Sakai¹, Daisuke Matsuo¹, Masaki Fujiwara¹, Takuya Ikeda¹, Shigeaki Kishida¹, Yoshitaka Setoguchi¹, Yasunori Andoh¹, Ryoko Miyanaga², Mami Fujii², Yukiharu Uraoka² (1.Nissin Electric, 2.NAIST)

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