Weiqi Zhou

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:30 AM - 11:30 AM PA4 (PA)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[14a-PA4-1~5] 13.3 Insulator technology

9:30 AM - 11:30 AM

▲ [14a-PA4-5] Reduction of Hydroxyl in the Low-Temperature Si Oxide Films Fabricated under Various Deposition Conditions

〇Weiqi Zhou¹, Susumu Horita¹ (1.JAIST)