kazushige sato

→ Search for kazushige sato in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

[14a-A305-4] Development of minimal fab ion milling tool and the process characterization

〇kazushige sato^1,4, Shunji Takahashi³, Shoji Den³, Sommawan Khumpuang^1,2, Hara Shiro^1,2 (1.MINIMAL, 2.AIST, 3.KATAGIRI ENGINEERING, 4.Sakaguchi E.H VOC Corp.)

▲