[12a-A202-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[12a-A202-7] Evaluation of metal contamination in SiO₂ by Pulse Photoconductivity Method

〇Hiroki Obana¹, Narumi Abe¹, Yuki Kumagae¹, Takuma Yamashita¹, Ryo Ogasawara², Tatsuki Hamada², Masanari Miyauchi², Ryo Yoshii², Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka² (1.GSST Kumamoto Univ., 2.Faculty of Technology Kumamoto Univ.)

Keywords:semiconductor