[12a-A301-1~5] Development of multinary compounds based on engineering for diverse stable phases -Future Materials Exploring Initiative ~Future of Environment and Energy Materials~ -

[12a-A301-5] Thermal Stability of Diverse Stable Phases: (Al_xGa_1-x)₂O₃ as an Example

〇(D)Riena Jinno¹, Kentaro Kaneko¹, Kazuyuki Uno², Shizuo Fujita¹ (1.Kyoto Univ., 2.Wakayama Univ.)

Keywords:aluminum gallium oxide, ultra-wide bandgap material, crystal phase transition

Oxides are representative for materials having various stable phases. For example, Ga₂O₃ takes 5 different stable phases of α,β,γ,δ,ε. Although the thermodynamically most stable phase of Ga₂O₃ is the beta-phase, the mist-CVD method allows the growth of the metastable phases as well as the stable one by choosing the proper substrates: alpha-phase/sapphire, beta-phase/YSZ, epsilon-phase/AlN. In this study, we will report the control of the various stable phases by mist-CVD and discuss "thermal stability of stable phase" giving the example of (Al,Ga)₂O_3.