[12a-A302-1~12] 15.4 III-V-group nitride crystals

[12a-A302-2] Improvement of surface flatness and crystallinity in N-polar AlN grown on vicinal sapphire substrate

〇Ryota Sakamoto¹, Tatuya Isono¹, Tadatoshi Ito¹, Kazuya Ataka², Yongzhao Yao³, Yukari Ishikawa³, Narihito Okada¹, Kazuyuki Tadatomo¹ (1.Yamaguchi University Graduate School, 2.Yamaguchi University, 3.Japan Fine Ceramics Center)

Keywords:AlN, Flatness, crystalline