[12a-A302-1~12] 15.4 III-V-group nitride crystals

△ [12a-A302-4] Growth of Al_0.55Ga_0.45N thick films on AlN templates with nano-sized patterned grooves

〇(M1)Shouhei Teramura¹, shimokawa moe¹, yamada kaduki¹, satou kousuke^1,2, Yasue shinji¹, tanaka shunya¹, ogino yuya¹, omori tomoya¹, Ishiduka sayaka¹, iwayama sho^1,4, iwaya motoaki¹, takeuchi tetsuya¹, kamiyama satoshi¹, akasaki isamu^1,3, hideto miyake¹ (1.Fac. S. &T., Meijo Univ., 2.Asahi-Kasei Co., 3.Akasaki R. C., Nagoya Univ., 4.Grad. Sch. of Reg. Innov. Stu., Mie Univ.)

Keywords:semiconductor, AlGaN, nanopattern