[12a-A405-1~11] 12.2 Characterization and Materials Physics

△ [12a-A405-4] Influence of Hydration and Fluctuating Structures at Surfaces of PVA Brush for Semiconductor Cleaning on Adsorption Behavior of Abrasive Grains Investigated by 3D-SFM

〇Takahiko Ikarashi¹, Takumi Yoshino¹, Kazuki Miyata^1,2, Keisuke Miyazawa^1,2, Megumi Uno³, Chikako Takatoh³, Takeshi Fukuma^1,2 (1.Dept. of. Eng., Kanazawa Univ., 2.WPI-NanoLSI, Kanazawa Univ., 3.EBARA Corp.)

Keywords:AFM, PVA