The 67th JSAP Spring Meeting 2020

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[12a-D519-1~9] 15.5 Group IV crystals and alloys

Thu. Mar 12, 2020 10:00 AM - 12:15 PM D519 (11-519)

Katsunori Makihara(Nagoya Univ.)

10:30 AM - 10:45 AM

[12a-D519-3] Precursor heating effects in solid-phase crystallization for Si thin film on an insulator

〇Takuto Mizoguchi1, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of Tsukuba)

Keywords:SiGe, Solid-phase crystallization, Thin film