[12a-PA2-1~77] 17 Nanocarbon Technology

[12a-PA2-37] Characteristics of Gas Sensors Based on Indium Oxide Deposited Graphene

Ryota Isu¹, Shoji Maeda¹, 〇Akira Fujimoto¹, Christopher J. Perini², Daiju Terasawa³, Akira Fukuda³, Masatoshi Koyama¹, Yoshiyuki Harada¹, Kazuto Koike¹, Mitsuaki Yano¹, Kazuhito Tsukagoshi⁴, Eric M. Vogel² (1.Osaka Inst. of Tech., 2.Georgia Tech, 3.Hyogo College of Med, 4.NIMS)

Keywords:graphene, Indium Oxide, Gas Sensing

In order to achieve the high sensitivity of our graphene gas sensors, we grew indium oxide films on graphene by means of atomic layer deposition method and evaluated the characteristics of gas sensing for it. By increasing the flow rate of the NO gas from 10 ppm to 100 ppm, we observed the step-like change of resistance and the increase of resistance by more than 2 orders of magnitude. NO gas turns into oxidizing NO₂ gas in the air. Our experimental results originate in the adsorption of oxidizing gases on the surface of indium oxide.