9:30 AM - 11:30 AM
[12a-PA2-37] Characteristics of Gas Sensors Based on Indium Oxide Deposited Graphene
Keywords:graphene, Indium Oxide, Gas Sensing
In order to achieve the high sensitivity of our graphene gas sensors, we grew indium oxide films on graphene by means of atomic layer deposition method and evaluated the characteristics of gas sensing for it. By increasing the flow rate of the NO gas from 10 ppm to 100 ppm, we observed the step-like change of resistance and the increase of resistance by more than 2 orders of magnitude. NO gas turns into oxidizing NO2 gas in the air. Our experimental results originate in the adsorption of oxidizing gases on the surface of indium oxide.