[12a-PA2-1~77] 17 Nanocarbon Technology

[12a-PA2-59] Fabrication of transition metal dichalcogenide heterostructures using molecular beam epitaxy

〇Yuya Murai¹, Hidemi Shigekawa², shoji Yoshida², Taichi Ochiai², Ryo Kitaura¹ (1.Nagoya Univ., 2.Tsukuba Univ.)

Keywords:MBE, TMD

In this research, we tried to establish a construction method for the purpose of creating a new artificial two-dimensional crystal “two-dimensional superlattice” that extended the concept of superlattice that joins different materials periodically. In this study, we fabricated heterostructures of transition metal dichalcogenide (TMD), a two-dimensional material, using molecular beam epitaxy (MBE). Specifically, MoSe₂ and NbSe₂ were grown periodically, and it was observed using a scanning tunneling microscope (STM).