[12a-PB2-1~7] 1.5 Instrumentation, measurement and Metrology

[12a-PB2-1] TEM Observation of Sub-10nm Nanopipette and Theoretical Analysis of its Resistance

〇Kazuki Shigyo¹, Linhao Sun¹, Shohei Takigaura², Riku Yajima², Masashi Tajima², Azuma Taoka¹, Keisuke Miyazawa¹, Takeshi Fukuma¹, Shinji Watanabe¹, Toshio Ando¹ (1.NanoLSI, 2.Kanazawa Univ.)

Keywords:nanopipette, TEM, nano pore

Nanopipette has been widely used in various nano measurements. In those nano-measurements, the shape of the tip of the nano-pipette has a great influence on the SN ratio. For such a reason, nanopipette shape measurement has been performed using SEM and TEM. However, when observing the nanopipette with an electron microscope, the pipette shape was thermally deformed due to the inelastic scattering of the electron irradiation. In this study, we report a pipette observation method without thermal deformation in TEM observation.