Absolute charge density evaluation of a capillary plate in a pulse modulated CCP

Presentation information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Mar 12, 2020 1:45 PM - 6:00 PM A205 (6-205)

Takayuki Ohta(Meijo Univ.), Masanaga Fukasawa(Sony Semiconductor Solutions), Taku Iwase(日立製作所)

3:45 PM - 4:00 PM

〇(D)Makoto Moriyama¹, Naoya Nakahara¹, Akihiro Mitsuya¹, Haruka Suzuki¹, Hirotaka Toyada¹ (1.Nagoya Univ.)

Keywords:CCP, Charge-up