Keywords:Electron Cyclotron Resonance Multicharged Ion Source (ECRIS), Upper Hybrid Resonance, Electron Energy Distribution Function (EEDF)
We have been trying to advanced experiments with 4-6GHz X-mode microwaves to 2.45GHz ECRIS (Osaka Univ.) plasma, and we have succeeded in enhancing production of multicharged ions by launching these bands X-mode microwaves. Furthermore, at the same time we have observed sharp increases of electron energy distribution functions (EEDF) in ECRIS plasma by means of probe methods. It have been concluded that the upper hybrid resonances(UHR) must have occurred by applying multiplex microwaves with their frequencies away from those frequencies for ECR in the ECRIS. In this presentation, we will report brief theoretical background and these new experimental results.
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