Keywords:Xe Ion Beams
Electron cyclotron resonance ion sources (ECRISs) are widely applied for ion beam applications, e.g., plasma processing, cancer therapy, and ion engine of an artificial satellite. In our ECRIS, we aim at producing and extracting various ion beams from this device, in particular, Xeq+ ion beams at low energy. In an aerospace engineering field, there are problems of accumulated damages on various component materials by low energy of Xe ion from the engine. There are not enough experimental sputtering data for satellite materials at the Xeq+ in the low energy region. Then we are trying to investigate sputtering yield experimentally by irradiating the low energy Xe ion beams. To perform this experiment, it is necessary to acquire a certain amount of beam current with low energy. Then we generate the low energy ion beams by the following steps. First, the ion beams are extracted from the ECRIS at high voltage. Next, these are transported to an ion beam irradiation system (IBIS). Finally, the ion beams are decelerated by the deceleration voltage in the IBIS. We adjusted the beamline. And we measure characteristics of the transport efficiency and decelerated ion beam currents. In this paper, we describe experimental setup using an existing ECRIS for decelerated heavy ion beams and the results of decelerated ion beam currents.
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