[12p-A302-1~18] 8.1 Plasma production and diagnostics

[12p-A302-6] Non-equilibrium rotational energy distribution of electronically excited states of CO molecules in reduced-pressure CO₂ plasma

Shota Yamada¹, Yuki Morita¹, Atsushi Nezu², 〇Hiroshi Akatsuka^3,1 (1.Eng. Tokyo Tech, 2.Tech-Div Tokyo Tech, 3.IIR, Tokyo Tech)

Keywords:CO2 plasma, CO molecule, rotational temperature

The vibrational and rotational temperatures T_v and T_r of the CO angstrom band and the third positive band (3PS) of the reduced-pressure microwave discharge CO₂ plasma are spectroscopically observed. The rotation temperature of 3PS was about 0.15 eV. On the other hand, for the Angstrom band, it is difficult to perform proper fitting when the rotation temperature is set to one. The fitting was optimized by setting the bulk component to 0.04 eV for 3/4 and the high energy tail component to 0.17 eV for the remaining quarter.