[12p-A401-7~8] 17.2 グラフェン

▲ [12p-A401-8] Transport properties of large-area fully & half meshed suspended graphene

〇(P)Fayong Liu¹、Soya Nakanao¹、Mayeesha Haque¹、Zhongwang Wang¹、Marek Schmidt¹、Shinichi Ogawa²、Yukinori Morita²、Muruganathan Manoharan¹、Hiroshi Mizuta¹ (1.JAIST、2.AIST)

キーワード：Graphene nanomesh, focused helium ion beam milling, porosity

Graphene nanomesh (GNM) has provided new opportunities to investigate both the fundamental physical properties and the applications in phononic crystal engineering to control thermal transport. By using the focused helium ion beam milling (HIM), GNM patterning in less than 4 nm nanopore diameter and a sub-10 nm pitch was achieved. In this work, we successfully fabricated a series of suspended graphene nanomesh devices with CVD graphene by HIM technique in high yield. This provided a way to investigate the effect of the porosity to the redirection of the energy carrier propagation with different pitches of the nanopores. Moreover, the transport properties of the symmetric ‘fully meshed’ structure and the asymmetric ‘half meshed’ structure were also investigated.