The 67th JSAP Spring Meeting 2020

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[12p-A403-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

Thu. Mar 12, 2020 1:15 PM - 5:30 PM A403 (6-403)

Keisuke Ohdaira(JAIST), Daiji Kanematsu(Panasonic), Shinsuke Miyajima(Tokyo Tech)

1:15 PM - 1:30 PM

[12p-A403-1] Desorption Mechanism of Surface Hydrogen on a-Si:H at around 200℃

〇Yasutake Toyoshima1 (1.RENRC/AIST)

Keywords:surface hydrogen, thermal desorption, activation energy

Surface hydrogen desorption from a-Si:H films starting from medium temperature (~200°C) leaves distorted Si-Si bond, resulting obstruction of micro-crystal formation. The detailed reaction mechanism is investigated using cluster-model based molecular orbital calculations to account for the observed desorption reaction features including temperature onset and activation energy.