[12p-PA3-1~33] 11 Superconductivity

[12p-PA3-17] Nano fabrication of magnesium diboride using He ion microscope

Kyotaro Ono¹, Kimihiro Norizawa², Ohnishi Kou³, Wakako Nakano³, Michio Naito⁴, Daisuke Sakai¹, 〇Hiroyuki Shibata¹ (1.Kitami Inst. Tech., 2.Osaka Univ., 3.Hokkaido Univ., 4.Tokyo Univ. of Agri. and Tech.)

Keywords:MgB2, He ion microscope

We grow thin films of MgB₂ by MBE, and fabricate nano-structure using He ion microscope.