The 67th JSAP Spring Meeting 2020

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Poster presentation

11 Superconductivity » 11 Superconductivity(Poster)

[12p-PA3-1~33] 11 Superconductivity

Thu. Mar 12, 2020 1:30 PM - 3:30 PM PA3 (PA)

1:30 PM - 3:30 PM

▲ [12p-PA3-26] Characterization of Superconducting TiN Thin Films Properties Developed at Different Substrate Temperature

〇Wei Qiu1, Hirotaka Terai1 (1.NICT)

Keywords:Superconducting qubit, Titanium nitride, DC magnetron sputtering