9:30 AM - 9:45 AM
[13a-A401-3] Improvement of resonance properties of cavity-sealing graphene resonator by applying strain
Keywords:graphene, resonance characteristics, SU-8
In recent years, a graphene-based MEMS resonant sensor that quantifies adsorbed molecules has attracted attention. However, lightweight graphene resonance film exhibits a low Q value, resulting in low frequency resolution. In this study, we addressed to fabricate a strain-induced graphene drum resonator for improvement of resonant frequency-Q factor (fQ) product by thermal shrinkage of SU-8 formed on the suspended graphene. We demonstrated to increase 1.13 fold resonant frequency and 1.7 fold Q factor by applying permanent strain.