The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

[13a-B401-1~10] 13.7 Compound and power electron devices and process technology

Fri. Mar 13, 2020 9:00 AM - 11:45 AM B401 (2-401)

Kozo Makiyama(Fujitsu Lab.)

10:30 AM - 10:45 AM

[13a-B401-6] Analysis of Schottky barrier height at a metal/AlN interface

〇(M1C)Yuta Kurosaki1, Okumura Hironori1 (1.Tsukuba Univ.)

Keywords:Aluminum nitride, X-ray photoelectron spectroscopy