[13a-B410-1~9] 3.7 Laser processing

[13a-B410-9] Wide and continuous analyses on the effects of repetition rates and pulse durations on the ultrashort-pulse laser drilling

〇Dai Yoshitomi¹, Hideyuki Takada¹, Aiko Narazaki¹, Kenji Torizuka¹, Yohei Kobayashi² (1.AIST, 2.ISSP Univ. Tokyo)

Keywords:laser, laser processing, femtosecond

We performed wide and continuous analyses on the effects of repetition rates and pulse durations in ultrashort-pulse laser drilling on Cu and Al plates by use of the parameter-variable laser processing machine and the automatic program on crater analysis. We investigated the variation of crater depths and debris in the range of repetition rates from 10 kHz to 1 MHz and pulse durations from 0.4 to 200 ps.