[13a-D519-1~10] 9.1 Dielectrics, ferroelectrics

[13a-D519-10] [Young Scientist Presentation Award Speech] SMR type transformers with ScAlN multilayer for rectifying antenna

〇Sarina Kinoshita^1,2, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST-PREST)

Keywords:piezoelectric transformer, piezoelectric thin film, ScAlN

The RF energy harvesting from surrounding electromagnetic wave is generally achieved by RF-DC conversion using a rectifying antenna. However, the diode in the rectenna cannot be activated efficiently by a weak RF signal. In this study, we propose piezoelectric transformer with ScAlN multilayer to overcome this problem. We reported HBAR type transformer in 2019. Here, SMR type transformer is demonstrated.