The 67th JSAP Spring Meeting 2020

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Oral presentation

9 Applied Materials Science » 9.1 Dielectrics, ferroelectrics

[13a-D519-1~10] 9.1 Dielectrics, ferroelectrics

Fri. Mar 13, 2020 9:00 AM - 11:45 AM D519 (11-519)

Ken-ichi Mimura(AIST), Takaaki Morimoto(National Defence Academy)

10:45 AM - 11:00 AM

[13a-D519-7] Resonance characteristics above 600 ºC of the PZT family epitaxial piezoelectric thin film resonator

〇Yuka Matsuda1,3, Takahiko Yanagitani1,2,3 (1.Waseda Univ., 2.JST PRESTO, 3.ZAIKEN)

Keywords:PTO, Piezoelectric material, Epitaxial growth