The 67th JSAP Spring Meeting 2020

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9 Applied Materials Science » 9.1 Dielectrics, ferroelectrics

[13a-D519-1~10] 9.1 Dielectrics, ferroelectrics

Fri. Mar 13, 2020 9:00 AM - 11:45 AM D519 (11-519)

Ken-ichi Mimura(AIST), Takaaki Morimoto(National Defence Academy)

11:00 AM - 11:15 AM

[13a-D519-8] Growth of in-plane axis aligned c-axis oriented AlN thin film

〇Chiaki Masamune1,3, Yakahiko Yanagitani1,2,3 (1.Waseda Univ., 2.JST PRESTO, 3.ZAIKEN)

Keywords:piezoelectric material, ion beam