9:30 AM - 11:30 AM
△ [13a-PA1-3] Study on fabrication method of bio-image sensor capable of measuring pressure and ion distribution
Keywords:Pressure and Ion Image Sensor, Potentiometric Sensor Array, Piezoelectric Polymer
We investigated the fabrication method of a pressure-ion image sensor that can measure pressure and ion distribution. The goal is to transfer the thin film piezoelectric material to a 2 µm-pitch pH image sensor developed by our research group and pattern it using photolithography to achieve a structure with alternating pressure and pH detectors.
First, a method of bonding a thin film piezoelectric material to a pH image sensor was studied, and it was possible to directly transfer the piezoelectric film to the sensor area without using an adhesive.
Next, an 8 µm square pressure detector was formed by opening the pH detector. Parylene C was vapor-deposited so that the pressure sensor did not respond to the pH change of the solution.
Finally, the operation of the fabricated sensor was verified. As a result, the response of pressure and pH change could be imaged. The pH sensitivity was 38.7 mV/pH and the pressure sensitivity was 4.34 mV/MPa.
First, a method of bonding a thin film piezoelectric material to a pH image sensor was studied, and it was possible to directly transfer the piezoelectric film to the sensor area without using an adhesive.
Next, an 8 µm square pressure detector was formed by opening the pH detector. Parylene C was vapor-deposited so that the pressure sensor did not respond to the pH change of the solution.
Finally, the operation of the fabricated sensor was verified. As a result, the response of pressure and pH change could be imaged. The pH sensitivity was 38.7 mV/pH and the pressure sensitivity was 4.34 mV/MPa.