Epitaxial growth of BiFeO<sub>3</sub> films on Si substrates by sputtering method Ⅲ

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Fri. Mar 13, 2020 9:30 AM - 11:30 AM PA2 (PA)

9:30 AM - 11:30 AM

〇Risa Kikuchi¹, Naoki Okamoto¹, Takeshi Yoshimura¹, Norifumi Fujimura¹ (1.Osaka Pref. Univ.)

Keywords:ferroelectric, BiFeO3, piezoelectric