9:30 AM - 11:30 AM
[13a-PA3-5] Highly sensitive hydrogen detection of a gas sensor based on TiO2 nanotube thin films
Keywords:titanium oxide, hydrogen gas sensor, Pt decoration
We have previously proposed a micro-scaled gas sensor using titanium oxide nanotube (TiO2 NT) thin films formed by locally anodizing Ti metallic thin films. In this study, in order to improve the performance of the gas sensor, we fabricated the gas sensor in which the TiO2 NT thin film is decorated with platinum fine particles using the atomic layer deposition (ALD) method, and examined the detection characteristics in detail. We confirmed that the sensor can detect hydrogen gas concentrations of 1 ppm or less.