[13a-PA3-1~35] 6.3 Oxide electronics

[13a-PA3-5] Highly sensitive hydrogen detection of a gas sensor based on TiO₂ nanotube thin films

Yasuo Kimura¹, Hiroyuki Abe², Teng Ma³, Daisuke Tadaki⁴, Ayumi Hirano-Iwata^3,4, 〇Michio Niwano⁵ (1.Tokyo Univ. of Tech., 2.ITIM, 3.AIMR, Tohoku Univ., 4.RIEC, Tohoku Univ., 5.Tohoku Fukushi Univ.)

Keywords:titanium oxide, hydrogen gas sensor, Pt decoration

We have previously proposed a micro-scaled gas sensor using titanium oxide nanotube (TiO₂ NT) thin films formed by locally anodizing Ti metallic thin films. In this study, in order to improve the performance of the gas sensor, we fabricated the gas sensor in which the TiO₂ NT thin film is decorated with platinum fine particles using the atomic layer deposition (ALD) method, and examined the detection characteristics in detail. We confirmed that the sensor can detect hydrogen gas concentrations of 1 ppm or less.