[13p-A303-1~9] 先端イオン顕微鏡技術の近年の進捗：ナノ材料・デバイスへの展開

▲ [13p-A303-1] Planar-type Si thermoelectric generators using nanopatterning

〇Masahiro Nomura¹ (1.IIS, Univ. of Tokyo)

キーワード：thermoelectrics, phonon, nanostructure

Design and performance of the nanostructured Si film thermoelectric generators will be presented. Also, key points for higher power generation will be discussed.