[13p-A303-1~9] 先端イオン顕微鏡技術の近年の進捗：ナノ材料・デバイスへの展開

▲ [13p-A303-4] Optomechanical device fabrication for the light detection using focused-ion-beam processing

〇Reo Kometani¹、Penekwong Khemnat¹、Shin-ichi Warisawa¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo)

キーワード：focused-ion-beam, chemical vapor deposition

Optomechanical device with a spiral bull’ eye antenna and a thin film Au/DLC resonator was fabricated using focused-ion-beam processing for the light detection. We demonstrated that the FIB-CVD enables us to fabricate the optomechanical device by a simple process. In addition, wavelength detection properties were evaluated using a laser with a wavelength of 1550 nm.