15:45 〜 16:15
▲ [13p-A303-6] Analytical capabilities on FIB instruments using SIMS: applications, current developments and prospects
キーワード：Focused ion beam, secondary ion mass spectrometry, analytical capabilities
Secondary Ion Mass Spectrometry (SIMS) is an extremely powerful technique for analyzing surfaces due to: ability to detect all elements from H to U/differentiate between isotopes, excellent sensitivity and high dynamic range. FIB-SIMS instruments offer interesting possibilities, including highly sensitive analytics, in-situ process control, highest resolution SIMS imaging (~10 nm), and direct correlation of SIMS data with other analytical/imaging data obtained on the same instrument.
We have developed compact high-performance magnetic sector mass spectrometers and installed such systems on different FIB based instruments, including the HIM, a FIB-SEM DualBeam and the npSCOPE instrument, which uses a Gas Field Ion Source and combines SE, SIMS and STIM imaging under normal and cryo-conditions.
Here, we will review the performance of the different instruments, focussing on new developments (e.g. cryo-capabilities/new detectors,) present a number of application examples (nanoparticles, battery materials, photovoltaics, micro-electronics, biology, geology,...) and give an outlook on new trends and prospects.
We have developed compact high-performance magnetic sector mass spectrometers and installed such systems on different FIB based instruments, including the HIM, a FIB-SEM DualBeam and the npSCOPE instrument, which uses a Gas Field Ion Source and combines SE, SIMS and STIM imaging under normal and cryo-conditions.
Here, we will review the performance of the different instruments, focussing on new developments (e.g. cryo-capabilities/new detectors,) present a number of application examples (nanoparticles, battery materials, photovoltaics, micro-electronics, biology, geology,...) and give an outlook on new trends and prospects.