The 67th JSAP Spring Meeting 2020

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Symposium (Oral)

Symposium » Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

[13p-A303-1~9] Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

Fri. Mar 13, 2020 1:30 PM - 5:15 PM A303 (6-303)

Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)

4:30 PM - 4:45 PM

▲ [13p-A303-8] Voltage contrast of BaTiO3 dielectric material by Helium Ion Microscopy

〇Shinichi Ogawa1, Akira Saito2 (1.AIST, 2.Murata Manufacturing)

Keywords:Helium Ion Microscopy, Voltage Contrast, BaTiO3