The 67th JSAP Spring Meeting 2020

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Symposium (Oral)

Symposium » Future developments on energy storage devices ~For improvement of capacitance and reliability~

[13p-A402-1~10] Future developments on energy storage devices ~For improvement of capacitance and reliability~

Fri. Mar 13, 2020 1:30 PM - 5:55 PM A402 (6-402)

Wataru Sakamoto(Chubu Univ.), Takeshi Yoshimura(Osaka Pref. Univ.)

2:00 PM - 2:30 PM

[13p-A402-2] Sputtering deposition of multilayer dielectric thin films

〇Isaku Kanno1 (1.Kobe Univ.)

Keywords:Dielectric thin film, All-solid-state Li-ion thin-film battery