[13p-A408-1~16] 12.7 Biomedical Engineering and Biochips

[13p-A408-13] [Highlight]Magnetic assembly of microwires with photoresist pattern for neuroprobe device

〇(M1)TECKSIENG CLAIREKING¹, Taiki Yasui¹, Yoshitaka Ito¹, Shinnosuke Idogawa¹, Yuusuke Morikawa¹, Takeshi Kawano¹ (1.Toyohashi Univ.)

Keywords:needle electrode, assembly, magnet

In this paper, we have proposed an assembly technique of three-dimensional microelectrodes using a magnet. Herein, a microwire of magnetic material of Ni, which is stood vertically on top of a substrate of Si via magnetic force, is then being slid into a hole of photoresist formed on top of the substrate. The vertically assembled wire is then encapsulated and fixed to the substrate. Experimental measurements of the Ni-microwire/Au-layer system show linear current-voltage characteristics indicating Ohmic contact behavior. Through this method, we have realized a new assembly technique of three-dimensional microelectrodes.