[13p-A408-1~16] 12.7 Biomedical Engineering and Biochips

△ [13p-A408-3] New Macroscopic All Solid Glassless pH Sensor Utilizing Vessel Gate and Diamond Solution Gate FET

〇(B)Shuto Kawaguchi¹, Yutaro Iyama¹, Yu Hao Chang¹, Kaito Tadenuma¹, Yukihiro Shintani¹, Yuichi Tao³, Kazutaka Mori³, Hiroshi Kawarada^1,2 (1.Waseda Univ, 2.KMLMST, 3.TAKAMATSU TEISAN)

Keywords:pH sensor, Stainless Steel Vessel, Diamond Solution Gate FET

For fabricating the all solid glassless pH sensor, we adopted a stainless steel container as the gate electrode (Vessel Gate). As a result, a pH sensitivity (~57 mV/pH) equivalent to the Nernst response (-59 mV/pH) was found on the stainless steel surface. In addition, a pH-insensitive hydrogen-terminated SGFET and Vessel Gate were combined to obtain a pH sensitivity of -54 mV/pH.