[13p-B410-1~10] Research progress on laser-induced periodic surface structure ~What has been revealed? How about the technology outlook?~

[13p-B410-8] Periodic metal nanopatterning using laser-induced photoreduction process

〇Atsushi Ono^1,2 (1.Shizuoka Univ., 2.RIE, Shizuoka Univ.)

Keywords:Laser processing, Photoreduction, Metal

We found that a fine metal pattern due to a laser-induced periodic surface structure is fabricated by the photoreduction process with a femtosecond pulsed laser irradiation. The laser fluence was about 7.5 mJ/cm^2, which was one order of magnitude lower than that of metal ablation. In this presentation, we will present a review of the laser photoreduction techniques and our recent research results related on periodic metal nanopatterning.