[13p-B414-1~9] Applied physics for quantum computer developments

[13p-B414-5] Superconducting qubits based on nitride superconductors

〇Hirotaka Terai¹, Senmi Kim¹, Tomoko Fuse¹, Wei Qiu¹, Taro Yamashita^2,3, Fumiki Yoshihara¹, Kouishi Semba¹ (1.NICT, 2.Nagoya Univ., 3.JST PRESTO)

Keywords:Superconductor, Qubit, Nitride material

We developed fabrication and evaluation of superconducting qubit based on fully-epitaxila NbN/AlN/NbN Josephson junctions. In this presentation, we we will introduce our recent progress in superconducting qubit based on fabrication technologies of (100)-oriented TiN films on Si (100) substrates and fully-epitaxial NbN/AlN/NbN junctions with low-leak current on the (100)-oriented TiN films on Si wafers.