[13p-B415-1~14] 3.3 Information photonics and image engineering

[13p-B415-6] Depth structure analysis by surface scanning in near-field microscope

〇Mayu Sao¹, Satoru Takeda², Yoshimasa Kawata² (1.Shizuoka Univ CMMP, 2.Shizuoka Univ.)

Keywords:near-field microscope

Near-field optical microscope can observe sample surfaces with high resolution by scanning a small light spot; however, it cannot observe depth structures far away from a light source because a light spot spreads in depth direction. In this study, we propose the observation technique that can obtain depth information using two-dimensional intensity patterns which are obtained when a light source irradiates a sample. The technique analyzes depth structures by evaluating correlation coefficients between observed two-dimensional intensity patterns and calculated reference intensity patterns.