[13p-B508-1~21] 3.9 テラヘルツ全般

▲ [13p-B508-5] Dependence of material and film thickness for inner metallic coating of THz waveguides on its propagation property

〇(D)Yuyuan Huang¹、Kuniaki Konishi²、Momoko Deura¹、Yusuke Shimoyama¹、Junji Yumoto²、Makoto Kuwata-Gonokami²、Yukihiro Shimogaki¹、Takeshi Momose¹ (1.Graduate Sch. of Eng., Univ. of Tokyo、2.Graduate Sch. of Sci., Univ. of Tokyo)

キーワード：terahertz waveguides, metal/silicon slit-arrays, material dependence

Metal-coated/dielectric stacked parallel-plate waveguides have been developed and analyzed by terahertz time-domain spetroscopy. The dependences of coated material, film thickness, waveguide length and oxidation of material have been evaluted. Details of the process and devices will be reported onsite.