[13p-B508-1~21] 3.9 Terahertz technologies

▲ [13p-B508-5] Dependence of material and film thickness for inner metallic coating of THz waveguides on its propagation property

〇(D)Yuyuan Huang¹, Kuniaki Konishi², Momoko Deura¹, Yusuke Shimoyama¹, Junji Yumoto², Makoto Kuwata-Gonokami², Yukihiro Shimogaki¹, Takeshi Momose¹ (1.Graduate Sch. of Eng., Univ. of Tokyo, 2.Graduate Sch. of Sci., Univ. of Tokyo)

Keywords:terahertz waveguides, metal/silicon slit-arrays, material dependence

Metal-coated/dielectric stacked parallel-plate waveguides have been developed and analyzed by terahertz time-domain spetroscopy. The dependences of coated material, film thickness, waveguide length and oxidation of material have been evaluted. Details of the process and devices will be reported onsite.