The 67th JSAP Spring Meeting 2020

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-D221-1~14] 6.4 Thin films and New materials

Fri. Mar 13, 2020 1:45 PM - 6:30 PM D221 (11-221)

Tetsuo Tsuchiya(AIST), Hiroaki Nishikawa(Kindai Univ.), Akira Ohtomo(Tokyo Tech)

5:30 PM - 5:45 PM

△ [13p-D221-11] Synthesis of Cu3N Epitaxial Thin Films by Mist Chemical Vapor Deposition

〇Daichi Oka1, Tomoteru Fukumura1,2 (1.Tohoku Univ., 2.Tohoku Univ. AIMR & CRC)

Keywords:Nitride, Epitaxial thin film, Mist chemical vapor deposition