[13p-PA7-1~12] 3.11 Photonic structures and phenomena

▲ [13p-PA7-10] Fabrication of Monocrystalline Magneto-optical Garnet Thin Film on Insulator Substrates for Exploring Magneto-nanophotonics

〇(D)Siyuan Gao^1,2, Yasutomo Ota³, Feng Tian¹, Yasuhiko Arakawa³, Satoshi Iwamoto^1,2,3 (1.RCAST, Univ. Tokyo, 2.IIS, Univ. Tokyo, 3.Nanoquine, Univ. Tokyo)

Keywords:magneto optics, wafer bonding, grinding

Magneto-optical (MO) materials are essential for inducing nonreciprocal optical phenomena and realizing various optical elements such as Faraday rotators and optical isolators. Monocrystalline yttrium iron garnet (YIG) is one of the most successful materials because of its moderate MO effect with low loss at telecom wavelengths. Nano-structuring such materials will enable further MO devices with extended functionalities, as have been examined in theoretical studies. However, experimental progress of this direction is rather limited partly due to the absence of high-quality MO thin-films on suitable handling substrates. Here, we propose and investigate wafer-bonding-based fabrication of MO-material-on-insulator (MOI) substrates as a starting point for exploring MO nanophotonics. In this correspondence, we report the progress of adhesive wafer bonding and grinding of monocrystalline YIG on silicon for thin film formation.