[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology

[13p-PA9-15] 6.6 kV class Normally-off GaN Polarization Super Junction (PSJ) Transistors

〇Shuichi Yagi¹, Takeru Saito¹, Fumihiko Nakamura¹, Yuta Isa¹, Yusuke Kamiyama¹, Hironobu Narui¹, Hiroji Kawai¹, Atsushi Tanaka², Yoshio Honda², Hiroshi Amano² (1.POWDEC, 2.Nagoya Univ. IMaSS)

Keywords:Gallium nitride, Transistor, Normally-off