[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology

[13p-PA9-18] Analytical evaluation of 2DEG depletion voltage in polarization junction substrate

〇(B)Taihei Matsuhashi¹, Takuya Hoshii¹, Hiromasa Okita¹, Akira Nakajima², Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹ (1.Tokyo Tech, 2.AIST)

Keywords:polarization junction substrate