4:00 PM - 6:00 PM
[13p-PA9-3] Temperature Measurement of GaN with Radiation Thermometer during Atmospheric Pressure Thermal-Plasma-Jet annealing
Keywords:Atmospheric Pressure Thermal-Plasma-Jet annealing, Gallium Nitrite, Rapid thermal annealing
Presentation information
Poster presentation
13 Semiconductors » 13.7 Compound and power electron devices and process technology
[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology
Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA9 (PA)